@article{wang2026design,
    author = {Bingran Wang and Min Sung Kim and Taewoong Yoon and Dasom Lee and Byeong-Sang Kim and Dougyong Sung and John T. Hwang},
    title = {Design Optimization of Semiconductor Manufacturing Equipment Using a Novel Multi-Fidelity Surrogate Modeling Approach},
    journal = {Springer-format journal manuscript (venue verify)},
    year = {2026},
    eprint = {2411.08149},
    archiveprefix = {arXiv},
    note = {Metadata verification: Crossref unavailable: HTTPError},
}