Design Optimization of Semiconductor Manufacturing Equipment Using a Novel Multi-Fidelity Surrogate Modeling Approach

@article{wang2026design,
  author = {Bingran Wang and Min Sung Kim and Taewoong Yoon and Dasom Lee and Byeong-Sang Kim and Dougyong Sung and John T. Hwang},
  title = {Design Optimization of Semiconductor Manufacturing Equipment Using a Novel Multi-Fidelity Surrogate Modeling Approach},
  journal = {Optimization and Engineering},
  volume = {27},
  number = {2},
  pages = {1451--1479},
  year = {2026}
}